LML70 Series

Single Axis Linear Motor Stages

The LML70 is a direct-drive linear motor-based positioning stage outfitted with dual linear guides, encoder feedback and strong aluminum construction — all in a compact module. This precision unit delivers up to 17.1N of continuous force (Fcn) and 51.3N peak (Fpk), with 0.05 µm optical encoder feedback resolution.

  • Self-lubricating linear guide
  • Strokes from 200/300 millimeters
  • Repeatability up to ±1 µm
  • Compact design
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Applications and Industries

Desirable for a host of automated equipment across a wide range of industries, the LML70 is especially suited for use with imaging systems that perform scanning operations, high-precision placement, semiconductor metrology and wafer fabrication applications.