AFC90 Series

Single Axis Linear Motor Stage

The AFC90 Series single-axis linear stage combines direct drive motor technology with dual linear guides and encoder feedback to deliver highly precise positioning. It provides 20 to 34N of continuous force (Fcn) and 55 to 91N peak (Fpk) in a compact design with strokes up to 55 millimeters with repeatability of ±0.5 µm. Designed for installation flexibility, this stackable linear stage can be combined with another direct drive linear module to, for example, form an X-Y stage.

  • Self-lubricating linear guide
  • Integrated optical encoder
  • 0.05 µm resolution
  • Aluminum housing
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Applications and Industries

AFC90 single-axis linear stages can provide sub-micron positioning, optical alignment and point-to-point high-speed positioning for a variety of automated equipment across many industries. Examples include scanning, high-precision placement, and semiconductor metrology and wafer fabrication systems.