TDS-XY Stacked Stages

Multi-Axis Linear Stages

The TDS-XY stacked stage incorporates three rail guides to support a longer upper axis in the bottom to deliver high performance. Well-suited for use with semiconductor equipment, the multi-axis unit features a compact size thanks to built-in custom flat cables.

  • High speed, high acceleration
  • High precision, high rigidity
  • Standard TDS design
  • Shorter lead times

Applications and Industries

This multi-axis stage is desirable for high-speed machinery such as pick and place, inspection, dispensing, inspection equipment or any other material handling or general industrial application where accuracy is critical, including printing, laser marking, machining and spot welding.



Axis (# of Axis)

Stroke (mm)

Continuous Force N

Peak Force N

Stroke (mm)
Continuous Force (N)
Peak Force (N)
Straightness (μm)
Flatness (μm)