PGS Series

The PGS-XY stacked stage and PGS-ZTPR wafer alignment module deliver highly precise positioning for demanding front-end semiconductor inspection and metrology equipment. The stacked PGS-XY unit offers high-speed, high accuracy in-plane positioning at various wafer locations along with long travel capabilities and zero cogging. For short-stroke multi-axis wafer alignment, the PGS-ZTPR mounts to the PGS-XY to provide four degrees of freedom to perform precision focusing, angular alignment, angle-of-incident adjustments and wafer wedge compensation tasks. The multi-axis PGS-ZTPR includes wear-free flexure bearings for frictionless guidance, and an optional feedthrough channel simplifies wafer chuck mounting.

• High precision and rigidity
• High speed, high acceleration
• Fast settling times
• Compact and lightweight