Active Vibration Isolation
With the largest number of systems install worldwide and the most advanced technologies being developed year after year, Integrated Dynamics Engineering (IDE) has proven to be a leader in vibration isolation and environmental controls for more than two decades.
Passive isolators are superior for eliminating floor induced building vibrations. However, they have limitations the major drawback is their sensitivity to payload induced vibrations and dynamic forces.
Active isolation provides "real time" 6 degrees of freedom control utilizing pneumatic air spring, coil spring or elastomeric springs as the basis for this unique hybrid approach. This combination allows for two significantly different approaches, SMS soft mount systems and HMS hard mount systems.
The HMS rely mainly on the active control loop for isolation and have a much higher closed loop bandwidth than SMS. The hard mount systems typically address higher frequency isolation issues with the passive springs tuned to 10 or 20 Hz. This design feature results in making the HMS extremely stiff and allows for large stage or dynamic payload forces, while eliminating unwanted excessive payload motion.
The SMS overall performance comes mainly from the passive spring element. The active feedback system uses efficient contactless high force linear actuators, combined with seismic inertial vibration sensors, and Mechopneumatic or high speed Electro pneumatic leveling valves. As a result, the system remains inherently soft, which provides excellent broadband low frequency isolation and active payload "sky hook" damping.
IDE’s advanced high-speed controller technology provides the broadest bandwidth of truly active control in the most challenging environments. Furthermore, IDE’s advanced control algorithms and high dynamic actuators deliver an immediate response and ultra-fast settling time in 6 degrees of freedom. With high motor force output and long stroke capability, IDE’s systems are highly effective in the toughest, most demanding customer locations.
IDE pioneered the development of Feedforward control-where disturbing signals are recognized and intercepted prior to their influence on the system. IDE first implemented dynamic Feedforward concepts using floor motion sensors known as Floor Feedforward sensors. The use of this feature provides unique low frequency isolation in the range of 1–10 Hz.
Applying Feedforward control to systems with XY- stages cancels the effects of the stage forces on the isolated payload. Combined with our Opticon family of high-speed digital controllers the interface between the host stage controller and the IDE system controller is seamless. Settling time after stage movement is virtually eliminated and the overall residual payload motion is greatly reduced.
IDE has developed the broadest technology portfolio offered today. This enables value engineering to be effectively applied to OEM applications in order to achieve and maintain low product cost without compromising overall performance. Whether it’s air spring, coil spring, elastomer spring or a hybrid design, IDE’s technology portfolio provides the broad range of capability required in any application.
As a result, incorporating IDE’s proven experience and technology into a key design and development project results in an excellent price /performance ratio effectively embedded in a robust package.
IDE’s family of active vibration isolators have been proven to provide superior performance at low frequency (a common effect of walking traffic nearby). Unlike stiffer isolators (ceramic based), IDE isolator technology protects critical images so they are stable, clear and unaffected even in the most heavily trafficked, severely disturbed environments.
Extensive IDE research has shown that with the limited range of "extended stroke" units, piezo isolators are typically ineffective at isolating high magnitude disturbances. In limited applications where hard mount systems are appropriate, IDE offers the solution of highly dependable and effective stiff coil spring isolation systems, without the reliability risk associated with piezo.